JPH0288U - - Google Patents
Info
- Publication number
- JPH0288U JPH0288U JP7366688U JP7366688U JPH0288U JP H0288 U JPH0288 U JP H0288U JP 7366688 U JP7366688 U JP 7366688U JP 7366688 U JP7366688 U JP 7366688U JP H0288 U JPH0288 U JP H0288U
- Authority
- JP
- Japan
- Prior art keywords
- transfer arm
- wafer
- wafer transfer
- rotating
- split
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7366688U JPH0288U (en]) | 1988-06-02 | 1988-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7366688U JPH0288U (en]) | 1988-06-02 | 1988-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0288U true JPH0288U (en]) | 1990-01-05 |
Family
ID=31298801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7366688U Pending JPH0288U (en]) | 1988-06-02 | 1988-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0288U (en]) |
-
1988
- 1988-06-02 JP JP7366688U patent/JPH0288U/ja active Pending
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